High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode - Université de technologie de Troyes Access content directly
Conference Papers Year : 2003
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hal-02497508 , version 1 (03-03-2020)

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  • HAL Id : hal-02497508 , version 1

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Yann Gilbert, Radouane Fikri, Anna Rumyantseva, Gilles Lerondel, Renaud Bachelot, et al.. High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode. Nanopatterns and nanostructures at the interface, Oct 2003, Mulhouse, France. ⟨hal-02497508⟩

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