Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process - Université de technologie de Troyes Access content directly
Journal Articles Surface and Coatings Technology Year : 2018
No file

Dates and versions

hal-02281470 , version 1 (09-09-2019)

Identifiers

Cite

Imane Bouabibsa, Salim Lamri, Akram Alhussein, Tiberiu Minea, Frédéric Sanchette. Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process. Surface and Coatings Technology, 2018, 354, pp.351-359. ⟨10.1016/j.surfcoat.2018.09.033⟩. ⟨hal-02281470⟩
40 View
0 Download

Altmetric

Share

Gmail Facebook X LinkedIn More