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Large scale sub-100 nm 2D nanostructuring obtained by nanosphere lithography combined with metal evaporation and reactive ion etching
Hind Kadiri
,
Marco Faustini
,
Daniel Turover
,
David Grosso
,
Gilles Lerondel
JNTE215 4èmes Journées Nationales sur les Technologies Emergentes en micro-nanofabrication, Nov 2015, Ecully, France
Conference papers
hal-02866321v1
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Advanced large scale colloidal lithography for sub-100 nm direct and indirect structuring: application to silicon and metals
Hind Kadiri
,
Marco Faustini
,
Daniel Turover
,
David Grosso
,
Anisha Gokarna
,
et al.
Tech connect World Innovation Conference & Expo, Jun 2015, Washington, United States
Conference papers
hal-02866188v1
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Nanostructuration by nanoimprint lithography of hybrid silica coatings
Alban Letailleur
,
Cedric Boissiere
,
François Ribot
,
Clément Sanchez
,
Jérémie Teisseire
,
et al.
Nanoimprint and Nanoprint Technology (NNT), Oct 2010, Copenhague, Denmark
Conference papers
hal-02526413v1
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Method for manufacturing a thin film of ordered silicon nanopatterns
David Grosso
,
Cedric Boissiere
,
Gilles Lerondel
Unknown Region, Patent n° : EP2875522 (B1). 2020
Patents
hal-03141741v1
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Light extraction study on quantum dots embedded in nanoimprinted silica matrix
Alban Letailleur
,
Thomas Richardot
,
François Ribot
,
Cedric Boissiere
,
Clément Sanchez
,
et al.
Nanoimprint and Nanoprint Technology (NNT), Oct 2010, Copenhague, Denmark
Conference papers
hal-02526421v1
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