@patent{lerondel:hal-03141918, TITLE = {{Proc{\'e}d{\'e} de pr{\'e}paration d'une couche nanostructur{\'e}e, nanostructure obtenue suivant un tel proc{\'e}d{\'e}}}, AUTHOR = {Lerondel, Gilles and Divay, Laurent}, URL = {https://utt.hal.science/hal-03141918}, NUMBER = {FR2945547 (B1)}, ADDRESS = {France}, YEAR = {2012}, MONTH = Feb, HAL_ID = {hal-03141918}, HAL_VERSION = {v1}, }