@patent{grosso:hal-03141741, TITLE = {{Method for manufacturing a thin film of ordered silicon nanopatterns}}, AUTHOR = {Grosso, David and Boissiere, Cedric and Lerondel, Gilles}, URL = {https://utt.hal.science/hal-03141741}, NUMBER = {EP2875522 (B1)}, ADDRESS = {Unknown Region}, YEAR = {2020}, MONTH = Jan, HAL_ID = {hal-03141741}, HAL_VERSION = {v1}, }