@patent{grosso:hal-03141429, TITLE = {{Proc{\'e}d{\'e} de fabrication d'une couche mince de nanoreliefs de silicium ordonn{\'e}s}}, AUTHOR = {Grosso, David and Boissiere, Cedric and Lerondel, Gilles}, URL = {https://utt.hal.science/hal-03141429}, NUMBER = {FR2993701 (B1)}, ADDRESS = {France}, YEAR = {2015}, HAL_ID = {hal-03141429}, HAL_VERSION = {v1}, }