Patents
Year : 2015
GILLES LERONDEL : Connect in order to contact the contributor
https://utt.hal.science/hal-03141429
Submitted on : Monday, February 15, 2021-11:52:19 AM
Last modification on : Monday, November 6, 2023-12:08:33 PM
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- HAL Id : hal-03141429 , version 1
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David Grosso, Cedric Boissiere, Gilles Lerondel. Procédé de fabrication d'une couche mince de nanoreliefs de silicium ordonnés. France, N° de brevet: FR2993701 (B1). 2015. ⟨hal-03141429⟩
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