@inproceedings{reece:hal-02866365, TITLE = {{Fabrication and Tuning of High Quality Porous Silicon (PSi) Microcavities}}, AUTHOR = {Reece, P. and Lerondel, Gilles and Mulders, J. and Zheng, W.H. and Gal, M.}, URL = {https://utt.hal.science/hal-02866365}, BOOKTITLE = {{PSST 2002}}, ADDRESS = {Puerto de la Cruz, Spain}, YEAR = {2002}, MONTH = Mar, HAL_ID = {hal-02866365}, HAL_VERSION = {v1}, }