<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-02866221</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-03T18:09:36+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">UV photonic structures fabrication by top-down lithography</title>
            <author role="aut">
              <persName>
                <forename type="first">Komla</forename>
                <surname>Nomenyo</surname>
              </persName>
              <idno type="halauthorid">1005811-0</idno>
              <affiliation ref="#struct-2167"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Roy</forename>
                <surname>Aad</surname>
              </persName>
              <idno type="halauthorid">867639-0</idno>
              <affiliation ref="#struct-2167"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Christophe</forename>
                <surname>Couteau</surname>
              </persName>
              <email type="md5">a2885f8dc80c696ab48d1ff59feab8d6</email>
              <email type="domain">utt.fr</email>
              <idno type="idhal" notation="string">christophe-couteau</idno>
              <idno type="idhal" notation="numeric">1043263</idno>
              <idno type="halauthorid" notation="string">1532933-1043263</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-7676-3205</idno>
              <idno type="IDREF">https://www.idref.fr/106996320</idno>
              <orgName ref="#struct-2167"/>
              <affiliation ref="#struct-2167"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Dave J.</forename>
                <surname>Rogers</surname>
              </persName>
              <idno type="halauthorid">643662-0</idno>
              <affiliation ref="#struct-309853"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Gilles</forename>
                <surname>Lerondel</surname>
              </persName>
              <email type="md5">2372e0968443bf056415d0a343fcd572</email>
              <email type="domain">utt.fr</email>
              <idno type="idhal" notation="string">gilles-lerondel</idno>
              <idno type="idhal" notation="numeric">179313</idno>
              <idno type="halauthorid" notation="string">1042-179313</idno>
              <idno type="IDREF">https://www.idref.fr/120689448</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-1942-3260</idno>
              <affiliation ref="#struct-2167"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Jean-Baptiste</forename>
                <surname>VU VAN</surname>
              </persName>
              <email type="md5">a709b5e248ad328ffc90f36f43c385ca</email>
              <email type="domain">utt.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2020-06-12 12:31:54</date>
              <date type="whenModified">2025-08-12 19:57:52</date>
              <date type="whenReleased">2020-06-12 12:31:54</date>
              <date type="whenProduced">2013-08-25</date>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="434222">
                <persName>
                  <forename>Jean-Baptiste</forename>
                  <surname>VU VAN</surname>
                </persName>
                <email type="md5">a709b5e248ad328ffc90f36f43c385ca</email>
                <email type="domain">utt.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-02866221</idno>
            <idno type="halUri">https://utt.hal.science/hal-02866221</idno>
            <idno type="halBibtex">nomenyo:hal-02866221</idno>
            <idno type="halRefHtml">&lt;i&gt;SPIE Optics and Photonics 2013&lt;/i&gt;, Aug 2013, San Diego, United States</idno>
            <idno type="halRef">SPIE Optics and Photonics 2013, Aug 2013, San Diego, United States</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="UNIV-TROYES">Université de Technologie de Troyes</idno>
            <idno type="stamp" n="P2MN" corresp="UNIV-TROYES">Physique, mécanique, matériaux et nanotechnologies</idno>
            <idno type="stamp" n="UTT">UTT</idno>
            <idno type="stamp" n="UTT-L2N" corresp="UNIV-TROYES">L2N</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="invited" n="0">No</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
            <note type="proceedings" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">UV photonic structures fabrication by top-down lithography</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Komla</forename>
                    <surname>Nomenyo</surname>
                  </persName>
                  <idno type="halauthorid">1005811-0</idno>
                  <affiliation ref="#struct-2167"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Roy</forename>
                    <surname>Aad</surname>
                  </persName>
                  <idno type="halauthorid">867639-0</idno>
                  <affiliation ref="#struct-2167"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Christophe</forename>
                    <surname>Couteau</surname>
                  </persName>
                  <email type="md5">a2885f8dc80c696ab48d1ff59feab8d6</email>
                  <email type="domain">utt.fr</email>
                  <idno type="idhal" notation="string">christophe-couteau</idno>
                  <idno type="idhal" notation="numeric">1043263</idno>
                  <idno type="halauthorid" notation="string">1532933-1043263</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-7676-3205</idno>
                  <idno type="IDREF">https://www.idref.fr/106996320</idno>
                  <orgName ref="#struct-2167"/>
                  <affiliation ref="#struct-2167"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Dave J.</forename>
                    <surname>Rogers</surname>
                  </persName>
                  <idno type="halauthorid">643662-0</idno>
                  <affiliation ref="#struct-309853"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Gilles</forename>
                    <surname>Lerondel</surname>
                  </persName>
                  <email type="md5">2372e0968443bf056415d0a343fcd572</email>
                  <email type="domain">utt.fr</email>
                  <idno type="idhal" notation="string">gilles-lerondel</idno>
                  <idno type="idhal" notation="numeric">179313</idno>
                  <idno type="halauthorid" notation="string">1042-179313</idno>
                  <idno type="IDREF">https://www.idref.fr/120689448</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-1942-3260</idno>
                  <affiliation ref="#struct-2167"/>
                </author>
              </analytic>
              <monogr>
                <title level="m">SPIE Optics and Photonics, San Diego Convention Center, San Diego, California (USA), August, 25-29th 2013</title>
                <meeting>
                  <title>SPIE Optics and Photonics 2013</title>
                  <date type="start">2013-08-25</date>
                  <date type="end">2013-08-29</date>
                  <settlement>San Diego</settlement>
                  <country key="US">United States</country>
                </meeting>
                <imprint/>
              </monogr>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <classCode scheme="halDomain" n="spi.opti">Engineering Sciences [physics]/Optics / Photonic</classCode>
              <classCode scheme="halTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halOldTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halTreeTypology" n="COMM">Conference papers</classCode>
            </textClass>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="researchteam" xml:id="struct-2167" status="OLD">
          <orgName>Laboratoire de Nanotechnologie et d'Instrumentation Optique</orgName>
          <orgName type="acronym">LNIO</orgName>
          <date type="end">2018-02-22</date>
          <desc>
            <address>
              <addrLine>12 rue Marie Curie - BP 2060 10010 TROYES CEDEX</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://lnio.utt.fr/fr/index.html</ref>
          </desc>
          <listRelation>
            <relation active="#struct-116261" type="direct"/>
            <relation active="#struct-93484" type="indirect"/>
            <relation name="UMR6281" active="#struct-441569" type="indirect"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-309853" status="INCOMING">
          <orgName>Nanovation SARL</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="laboratory" xml:id="struct-116261" status="OLD">
          <idno type="RNSR">201019052V</idno>
          <orgName>Institut Charles Delaunay</orgName>
          <orgName type="acronym">ICD</orgName>
          <date type="start">2006-01-01</date>
          <date type="end">2020-12-31</date>
          <desc>
            <address>
              <addrLine>12, rue Marie Curie BP 2060 - 10010 Troyes Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://icd.utt.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-93484" type="direct"/>
            <relation name="UMR6281" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-93484" status="VALID">
          <idno type="ROR">https://ror.org/01qhqcj41</idno>
          <orgName>Université de Technologie de Troyes</orgName>
          <orgName type="acronym">UTT</orgName>
          <desc>
            <address>
              <addrLine>12 rue Marie CurieCS 4206010004 TROYES CEDEX</addrLine>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>