@patent{grosso:hal-02866019, TITLE = {{Proc{\'e}d{\'e} de fabrication d'une couche mince de nanoreliefs de silicium ordonn{\'e}s}}, AUTHOR = {Grosso, David and Boissiere, Cedric and Lerondel, Gilles}, URL = {https://utt.hal.science/hal-02866019}, NUMBER = {FR2993701 (A1)}, ADDRESS = {France}, YEAR = {2012}, HAL_ID = {hal-02866019}, HAL_VERSION = {v1}, }