@inproceedings{moughames:hal-02526138, TITLE = {{New formulation for 2D photolithography with ultra-high resolution for photonic applications}}, AUTHOR = {Moughames, Johnny and Bruyant, Aur{\'e}lien and Akil, Suzanna and Herro, Ziad and Jradi, Safi}, URL = {https://utt.hal.science/hal-02526138}, BOOKTITLE = {{9th International Conference on Material Sciences (CSM9)}}, ADDRESS = {Nancy, France}, SERIES = {9th International Conference on Material Sciences (CSM9), August 26-28, Nancy, France}, PAGES = {167-169}, YEAR = {2015}, MONTH = Aug, HAL_ID = {hal-02526138}, HAL_VERSION = {v1}, }