@inproceedings{kochtcheev:hal-02460103, TITLE = {{Fabrication par lithographie de nanostructures pour la microscopie optique en champ proche}}, AUTHOR = {Kochtcheev, Serguei and Deturche, R{\'e}gis and Rumyantseva, Anna and Lerondel, Gilles and Royer, Pascal}, URL = {https://utt.hal.science/hal-02460103}, BOOKTITLE = {{Journ{\'e}es du club nanotechnologie 2001}}, ADDRESS = {Paris, France}, YEAR = {2001}, HAL_ID = {hal-02460103}, HAL_VERSION = {v1}, }