%0 Conference Paper %F Oral %T Enlarged sample holder for optical AFM imaging: Millimeter scanning with high resolution %+ Laboratoire d'Ingénierie des Systèmes de Versailles (LISV) %+ Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO) %A Sinno, Ahmad %A Ruaux, Pascal %A Chassagne, Luc %A Topçu, Suat %A Alayli, Yasser %A Lerondel, Gilles %A Blaize, Sylvain %A Bruyant, Aurélien %A Royer, Pascal %< avec comité de lecture %B IEEE EUROCON 2009 (EUROCON) %C St. Petersburg, France %I IEEE %P 2070-2074 %8 2009-05-18 %D 2009 %R 10.1109/EURCON.2009.5167933 %Z Engineering Sciences [physics]/Optics / Photonic %Z Engineering Sciences [physics]/Micro and nanotechnologies/MicroelectronicsConference papers %X We developed a home-made sample-holder unit used for 2D nano-positioning with millimeter traveling ranges. For each displacement axis, the system includes a long range traveling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. We chose here to characterize highly integrated optical structures. For this purpose, the sample-holder is integrated into an atomic force microscope in order to perform optical imaging. To demonstrate the overall performances, a millimeter scale optical images have been realized. %G English %L hal-02313791 %U https://utt.hal.science/hal-02313791 %~ CNRS %~ UNIV-TROYES %~ UVSQ %~ LISV %~ UTT %~ GS-SPORT-HUMAN-MOVEMENT