@article{barchiesi:hal-02285211, TITLE = {{Principle of Apertureless Scanning Near-Field Optical Microscopy: On the Way to the Optical Metrology of Nanostructures}}, AUTHOR = {Barchiesi, Dominique and Grimault, Anne-Sophie and Grosges, Thomas and Mac{\'i}as, Demetrio and Vial, Alexandre}, URL = {https://utt.hal.science/hal-02285211}, JOURNAL = {{Journal of the Korean Physical Society}}, PUBLISHER = {{Korean physical society}}, VOLUME = {47}, PAGES = {S166-S174}, YEAR = {2005}, MONTH = Aug, KEYWORDS = {Near-field ; Metrology ; Finite element method ; Finite difference time domain ; Inverse problem ; Numerical modeling ; Diffraction ; Scattering ; Classical electromagnetism ; Maxwell's equations}, HAL_ID = {hal-02285211}, HAL_VERSION = {v1}, }